Items where Author is "Gottschalk, Kay-Eberhard"

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Article

Nilsen, Madeleine and Port, Fabian and Roos, Michael and Gottschalk, Kay-Eberhard and Strehle, Steffen (2019) Facile modification of freestanding silicon nitride microcantilever beams by dry film photoresist lithography. Journal of Micromechanics and Microengineering, 29 (2). 025014. ISSN 0960-1317

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