Items where Author is "Strehle, Steffen"
Group by: Item Type | No Grouping
Number of items: 1.
Nilsen, Madeleine and Port, Fabian and Roos, Michael and Gottschalk, Kay-Eberhard and Strehle, Steffen (2019) Facile modification of freestanding silicon nitride microcantilever beams by dry film photoresist lithography. Journal of Micromechanics and Microengineering, 29 (2). 025014. ISSN 0960-1317